6 results
Quantitative Measurement of Interface Fracture Energy in Multi-Layer Thin Film Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 391 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 91
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- 1995
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Correlation of The Mechanical Properties of Silicon Oxynitride Films to Processing Parameters, Film Stoichiometry, and Hydride Bond Concentration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 391 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 479
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- 1995
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Development of A Silane Rich CVD Tungsten Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 561
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- 1994
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Composition and Structure of as-Deposited and Oxidized Dcs-Based Cvd WsiX Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 487
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- 1994
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Characterization of PECVD SixOyNz:H Films and its Correlation to Device Performance and Reliability
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- Journal:
- MRS Online Proceedings Library Archive / Volume 338 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 75
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- 1994
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Reliability Issues of a Crack-Resistant Passivation Layer Process for Sub-Micron Non-Volatile Memory Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 309 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 41
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- 1993
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